The recovery of sulfuric acid from spent piranha solution over a dimensionally stable anode (DSA) Ti-RuO2 electrode

Piranha solution is a highly acidic mixture of sulfuric acid and hydrogen peroxide. The present study aimed at developing dimensionally stable anode (DSA), made titanium metal foil coated with Ruthenium Dioxide (RuO2), for the electrochemical oxidation peroxide in presence strong under ambient conditions. Results showed that piranha was fully degraded 5 h constant current 2 A (or density 0.32 A-cm-2). kinetics followed Langmuir-Hinshelwood model. observed rate function applied current. initial efficiency 17.5% 0.5 0.08 A-cm-2) slightly decreased to about 13.5% between 1.3 1.5 0.208 0.24 capability feasibility process recovery from spent semiconductor industrial installations or general laboratories.